{"id":7959,"date":"2018-04-04T11:33:23","date_gmt":"2018-04-04T11:33:23","guid":{"rendered":"http:\/\/testnuevaweb.avactec.es\/gas-detection-and-neutralization\/neutralizacion-de-gases-peligrosos\/"},"modified":"2024-07-29T12:10:08","modified_gmt":"2024-07-29T10:10:08","slug":"exhaust-gas-abatement","status":"publish","type":"page","link":"https:\/\/avactec.es\/en\/gas-detection-and-neutralization\/exhaust-gas-abatement\/","title":{"rendered":"Exhaust gas abatement"},"content":{"rendered":"

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ith more than 35 years of experience, CS CLEAN SOLUTIONS GmbH is your reliable partner for exhaust gas abatement in semiconductor, photovoltaic and related industries.<\/p>\n

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Our customers include all major chip manufacturers and the world’s leading research institutes.
\nOur environmentally friendly CLEANSORB\u00aetechnology is developed in Ismaning near Munich and marketed through an international sales and service network.<\/p>\n

As the global technology leader in our field, our dry exhaust gas abatement does not require the use of fossil fuels or water providing additional benefits to the environment and the climate.<\/p>\n\n\t\t<\/div> \n\t<\/div> [\/vc_column][\/vc_row][vc_row no_padding=”true” equal_height=”true” content_position=”center” bg_type=”” dima_canvas_style=”” translate_x=”0″ dima_z_index=”0″ delay=”” animate_item=”” delay_duration=”” delay_offset=”” id=”” class=”” border_color=””][vc_column min_height=”” bg_type=”” dima_canvas_style=”” translate_x=”0″ dima_z_index=”0″ delay=”” animate_item=”” delay_duration=”” delay_offset=”” width=”1\/3″]

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Purification of waste gas is based on our proprietary dry bed absorption technology. All products have earned an unparalleled track record for safety, process reliability and environmentally-sustainable manufacturing.<\/p>\n

Whether your abatement application is in the semiconductor, photovoltaic, pharmaceutical, or chemical industries, it requires the removal of downstream hazardous gases. Discover the benefits of CS CLEAN SOLUTIONS\u2019 unique technology and worldwide support to keep your manufacturing process safe.<\/p>\n\n\t\t<\/div> \n\t<\/div>

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CLEANSORB\u00ae – Dry bed abatement of process waste gas<\/span><\/h3>\n

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\nCS CLEAN SOLUTIONS uses advanced chemisorber technology to design waste gas abatement systems which are unmatched in their scrubbing efficiency, yet absolutely simple to operate.<\/span>\n<\/p><\/blockquote>\n\n\t\t<\/div> \n\t<\/div> [\/vc_column_inner][vc_column_inner content_position=”center” float=”center” delay=”” animate_item=”” delay_duration=”” delay_offset=”” translate_x=”0″ dima_z_index=”0″ width=”1\/2″ id=”” class=”” style=”” border_color=”” css=”.vc_custom_1721038458748{padding-left: 30px !important;}”]

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CLEANSORB\u00ae – Extracci\u00f3n por lecho seco de gas residual de proceso<\/span><\/h3>\n

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\nCS CLEAN SOLUTIONS utiliza tecnolog\u00eda de quimisorbentes avanzada para dise\u00f1ar sistemas de reducci\u00f3n de gases de desecho inigualables en su eficacia de depuraci\u00f3n, aunque su funcionamiento es realmente simple.<\/span>\n<\/p><\/blockquote>\n\n\t\t<\/div> \n\t<\/div> [\/vc_column_inner][vc_column_inner delay=”” animate_item=”” delay_duration=”” delay_offset=”” translate_x=”0″ dima_z_index=”0″ width=”1\/2″]

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CLEANSORB\u00ae STAND ALONE<\/h4>\n

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For small-scale research work, stand-alone absorber columns can be used to remove remaining gas concentrations downstream of the experimental chamber. Several safety components are available as accessories, including an air-extractable housing cabinet as well as options for pressure monitoring and downstream gas detection.<\/p>\n\n\t\t<\/div> \n\t<\/div> CHARACTERISTICS<\/a>[\/vc_column][vc_column min_height=”” bg_type=”” dima_canvas_style=”” translate_x=”0″ dima_z_index=”0″ delay=”” animate_item=”” delay_duration=”” delay_offset=”” width=”1\/4″]

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CLEANSORB\u00ae LABLINE<\/h4>\n

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A small absorber column housed in a compact, air-extracted cabinet. Is permanently on ready and does not have to be heated up or otherwise activated each time a new experiment is to be run.<\/p>\n\n\t\t<\/div> \n\t<\/div> CHARACTERISTICS<\/a>[\/vc_column][vc_column min_height=”” bg_type=”” dima_canvas_style=”” translate_x=”0″ dima_z_index=”0″ delay=”” animate_item=”” delay_duration=”” delay_offset=”” width=”1\/4″]

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CLEANSORB\u00ae FABLINE<\/h4>\n

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Is the standard CLEANSORB model for waste gas removal on factory-scale applications. Available in three column sizes, the system is readily adaptable to the requirements of both pilot line and full-scale manufacturing.<\/p>\n\n\t\t<\/div> \n\t<\/div> CHARACTERISTICS<\/a>[\/vc_column][vc_column min_height=”” bg_type=”” dima_canvas_style=”” translate_x=”0″ dima_z_index=”0″ delay=”” animate_item=”” delay_duration=”” delay_offset=”” width=”1\/4″]

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CLEANSORB\u00ae PRIMELINE<\/h4>\n

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Represents the fully-featured version of the CLEANSORB family of dry bed exhaust gas abatement systems. The system is especially engineered to handle the gas flows and related operating conditions of safety-critical process applications \u2013 notably those of Metal Organic Chemical Vapor Deposition.<\/p>\n\n\t\t<\/div> \n\t<\/div> CONTACT US<\/a>[\/vc_column][\/vc_row][vc_row no_margin=”true” no_padding=”true” equal_height=”true” dark=”true” bg_type=”bg_video” di_video_start_time=”0″ di_video_end_time=”” dima_canvas_style=”” translate_x=”0″ dima_z_index=”0″ delay=”” animate_item=”” delay_duration=”” delay_offset=”” id=”” class=”” border_color=”” di_bg_video=”https:\/\/www.youtube.com\/watch?v=tRHUhpddww8″ tutorials=””][vc_column min_height=”” bg_type=”” dima_canvas_style=”” translate_x=”0″ dima_z_index=”0″ visibility_xld=”visible” visibility_ld=”visible” visibility_md=”hidden” visibility_sd=”hidden” visibility_xsd=”hidden” delay=”” animate_item=”” delay_duration=”” delay_offset=”” width=”1\/1″ id=”” class=”” style=”” border_color=””]

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PLASMA CONVERSION SYSTEMS (PCS)<\/span><\/h3>\n

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Plasma Conversion PCS TROPO & PCS STRATO<\/h3>\n

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\nThe PCS TROPO and PCS STRATO atmospheric plasma conversion systems are high performance plasma sources, developed to destroy perfluorinated compounds such as CF4, CHF3, SF6 and NF3 that are emitted from semiconductor etch and related processes.\n<\/p><\/blockquote>\n\n\t\t<\/div> \n\t<\/div>

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Plasma Conversion PCS TROPO & PCS STRATO<\/h3>\n

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\nIs a high performance plasma source, developed to destroy NH3 which is emitted from GaN and related processes. For existing installations requiring NH3 removal capability, the PCS EXO is readily retrofitted. Chlorine used during cleaning steps is best removed using a CLEANSORB\u00ae dry bed chemisorber.\n<\/p><\/blockquote>\n\n\t\t<\/div> \n\t<\/div>

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CLEAN-PROTECT – Safeguard against emergency gas release<\/span><\/h3>\n

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CLEAN-PROTECT is designed to absorb toxic or otherwise hazardous gases during an emergency gas release incident. This safety installation guards against uncontrolled escape of toxic, corrosive, or pyrophoric gases from one or several gas supply cabinets, thus protecting the workplace and the factory neighborhood.<\/span><\/p>\n<\/blockquote>\n\n\t\t<\/div> \n\t<\/div>

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CLEAN-PROTECT – Protecci\u00f3n frente a casos de emergencia por fuga de gas<\/span><\/h3>\n

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CLEAN-PROTECT se ha dise\u00f1ado para absorber gases t\u00f3xicos o peligrosos en los casos de emergencia por fuga de gas. Esta instalaci\u00f3n de seguridad protege contra los escapes no controlados de gases t\u00f3xicos, corrosivos o autoinflamables de uno o varios m\u00f3dulos de suministro de gas, protegiendo as\u00ed el entorno de trabajo y los alrededores de la f\u00e1brica.<\/span><\/p>\n<\/blockquote>\n\n\t\t<\/div> \n\t<\/div>

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Available for a wide range of special purpose gases<\/h3>\n

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\nAt the heart of the CLEAN-PROTECT system is the dry chemisorbent material, CLEANSORB\u00ae. Escaping gases undergo an irreversible chemical reaction (oxidation or neutralization) within the CLEAN-PROTECT system, where they are safely converted into solid by-products. The system is installed inline with downstream air extract ducting and does not require power or other facilities to operate, meaning that it is permanently on stand-by.\n<\/p><\/blockquote>\n

The CLEAN-PROTECT system is manufactured from high-quality 316L stainless steel. In the absence of a gas release incident the change-out frequency of the absorber bed is five years.<\/p>\n\n\t\t<\/div> \n\t<\/div> MORE INFORMATION<\/a>[\/vc_column][\/vc_row][vc_row no_margin=”true” no_padding=”true” equal_height=”true” dark=”true” bg_type=”bg_image” dima_canvas_style=”” translate_x=”0″ dima_z_index=”0″ delay=”” animate_item=”” delay_duration=”” delay_offset=”” id=”” class=”” border_color=”” di_bg_image=”7091″][vc_column min_height=”” bg_type=”” dima_canvas_style=”” translate_x=”0″ dima_z_index=”0″ delay=”” animate_item=”” delay_duration=”” delay_offset=”” width=”1\/1″]

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CLEANVENT – Mini cartridge for gas cabinet vent lines<\/span><\/h2>\n

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For over 20 years the CLEANVENT cartridge has proven itself a safe solution for the removal of hazardous purge gases.<\/span><\/p>\n<\/blockquote>\n

Installed within the gas cabinet on the suction side of the venturi vacuum generator, or in a valve manifold box, the CLEANVENT cartridge allows residual gases to be scrubbed “at-source\u201c. \u00a0<\/span><\/p>\n\n\t\t<\/div> \n\t<\/div>

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Designed to absorb toxic or dangerous gases in case of emergency due to gas leakage<\/h3>\n

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\nBefore a new gas cylinder is put on-line within a gas supply cabinet, process gas remaining from the previous cylinder must first be removed \u2013 both for reasons of safety and to ensure integrity of the fresh gas supply. The dead volume of residual gas is likely to be highly concentrated, toxic, pyrophoric, or corrosive, thus posing a considerable safety hazard.\n<\/p><\/blockquote>\n

Purge gases are evacuated through the absorber bed of the cartridge and are purified from hazardous gas concentrations by irreversible chemical conversion to solids. Refillable CLEANVENT cartridge types are available for a broad range of specialty gases and are supported by CS CLEAN SYSTEMS worldwide network of service partners.<\/p>\n\n\t\t<\/div> \n\t<\/div> MORE INFORMATION<\/a>

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PIRANHA – Abatement of global warming PFC gases<\/span><\/h2>\n

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Most semiconductor manufacturers have already begun to implement measures to combat PFC emissions, with PFC abatement a key part of an overall reduction strategy.<\/span><\/p>\n\n\t\t<\/div> \n\t<\/div>

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Purification of PFC gases responsible for global warming<\/h4>\n

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\nThe semiconductor industry has committed itself to further reduce its emissions of perfluorinated compounds (PFCs), which give rise to the “greenhouse effect”. Most semiconductor manufacturers have already begun to implement measures to combat PFC emissions, with PFC abatement a key part of an overall reduction strategy.\n<\/p><\/blockquote>\n

PFC gases such as CF4, CHF3, SF6 and NF3 are emitted from semiconductor Plasma Etch and Strip processes as well as CVD Chamber Cleans.<\/p>\n

The PCS PIRANHA foreline plasma conversion systems are designed to convert the stable PFCs to reactive by-products. The PCS PIRANHA is installed in the vacuum foreline of the etch chamber for maximum efficiency. Small flows of a reaction partner such as oxygen or water are added to prevent re-combination of the dissociated F and C atoms. The reactive by-products are best removed using a CLEANSORB\u00ae<\/sup>dry bed chemisorber.<\/p>\n\n\t\t<\/div> \n\t<\/div> [\/vc_column][\/vc_row][vc_row bg_type=”” dima_canvas_style=”” translate_x=”0″ dima_z_index=”0″ delay=”” animate_item=”” delay_duration=”” delay_offset=”” id=”” class=”” border_color=””][vc_column min_height=”” bg_type=”” dima_canvas_style=”” translate_x=”0″ dima_z_index=”0″ delay=”” animate_item=”” delay_duration=”” delay_offset=”” width=”1\/1″]

DIND'T FIND WHAT YOU ARE LOOKING FOR?<\/h4>

We can advise you and supply what you need<\/p><\/div>

CONTACT US<\/a><\/div><\/div>[\/vc_column][\/vc_row]<\/p>\n","protected":false},"excerpt":{"rendered":"

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