{"id":8715,"date":"2018-08-02T14:14:57","date_gmt":"2018-08-02T12:14:57","guid":{"rendered":"https:\/\/avactec.es\/nuevo-boletin-de-oxford-instruments-plasma-technology-sobre-las-tecnicas-adl-y-ale\/"},"modified":"2018-08-02T14:44:50","modified_gmt":"2018-08-02T12:44:50","slug":"oxford-instruments-plasma-technology-have-updated-their-brochures-for-ald-and-ale","status":"publish","type":"post","link":"https:\/\/avactec.es\/en\/oxford-instruments-plasma-technology-have-updated-their-brochures-for-ald-and-ale\/","title":{"rendered":"Oxford Instruments Plasma Technology have updated their brochures for ALD and ALE"},"content":{"rendered":"

[vc_row no_margin=”true” section_content=”inside_container” no_padding=”true” bg_type=”” dima_canvas_style=”” translate_x=”0″ dima_z_index=”0″ animate_item=”” delay_duration=”” delay_offset=”” id=”” class=”” border_color=””][vc_column bg_type=”” dima_canvas_style=”” min_height=”” translate_x=”0″ dima_z_index=”0″ delay=”” delay_duration=”” delay_offset=”” width=”1\/2″][vc_column_text]Oxford Instruments Plasma Technology <\/a>have updated their\u00a0Brochures for ALD and ALE<\/strong> (Atomic Layer Deposition and Atomic Layer Etching in English).[\/vc_column_text][\/vc_column][vc_column bg_type=”” dima_canvas_style=”” min_height=”” translate_x=”0″ dima_z_index=”0″ delay=”” delay_duration=”” delay_offset=”” width=”1\/2″]

\"\"<\/a><\/div>[\/vc_column][\/vc_row][vc_row no_margin=”true” no_padding=”true” bg_type=”” dima_canvas_style=”” translate_x=”0″ dima_z_index=”0″ animate_item=”” delay_duration=”” delay_offset=”” id=”” class=”” border_color=””][vc_column bg_type=”” dima_canvas_style=”” min_height=”” translate_x=”0″ dima_z_index=”0″ delay=”” delay_duration=”” delay_offset=”” width=”1\/1″][vc_column_text]<\/p>\n

Brochures for ALD and ALE<\/h2>\n

[\/vc_column_text][vc_empty_space][\/vc_column][\/vc_row][vc_row no_margin=”true” no_padding=”true” bg_type=”” dima_canvas_style=”” translate_x=”0″ dima_z_index=”0″ animate_item=”” delay_duration=”” delay_offset=”” id=”” class=”” border_color=””][vc_column bg_type=”” dima_canvas_style=”” min_height=”” translate_x=”0″ dima_z_index=”0″ delay=”” delay_duration=”” delay_offset=”” width=”1\/2″][vc_column_text]<\/p>\n

ALD Technique (Atomic Layer Deposition)<\/h3>\n

ALD is a technique for the deposition of precisely controlled ultra-thin films<\/a> for advanced applications on the nanometre scale, with conformal coating into high aspect ratio structures.<\/p>\n

Highlights<\/strong><\/p>\n

– Self-limiting atomic layer-by-layer growth<\/p>\n

– Highly conformal coating<\/p>\n

– Pin-hole and particle free deposition<\/p>\n

– Low plasma damage<\/p>\n

– Low-temperature ALD processes<\/p>\n

– Reduced nucleation delay<\/p>\n

– Wide range of materials[\/vc_column_text][\/vc_column][vc_column bg_type=”” dima_canvas_style=”” min_height=”” translate_x=”0″ dima_z_index=”0″ delay=”” delay_duration=”” delay_offset=”” width=”1\/2″][vc_empty_space height=”64px”]

\"\"<\/a><\/div>[\/vc_column][\/vc_row][vc_row no_margin=”true” no_padding=”true” bg_type=”” dima_canvas_style=”” translate_x=”0″ dima_z_index=”0″ animate_item=”” delay_duration=”” delay_offset=”” id=”” class=”” border_color=””][vc_column bg_type=”” dima_canvas_style=”” min_height=”” translate_x=”0″ dima_z_index=”0″ delay=”” delay_duration=”” delay_offset=”” width=”1\/1″][vc_empty_space][\/vc_column][\/vc_row][vc_row no_margin=”true” no_padding=”true” bg_type=”” dima_canvas_style=”” translate_x=”0″ dima_z_index=”0″ animate_item=”” delay_duration=”” delay_offset=”” id=”” class=”” border_color=””][vc_column bg_type=”” dima_canvas_style=”” min_height=”” translate_x=”0″ dima_z_index=”0″ delay=”” delay_duration=”” delay_offset=”” width=”1\/2″][vc_column_text]<\/p>\n

ALE Technique (Atomic Layer Etching)<\/h3>\n

ALE allows the accurate removal of material one atomic layer at a time<\/a>; a level of control unachievable using conventional etching.<\/p>\n

Highlights<\/strong><\/p>\n

– Ultra low damage
\n– High selectivity
\n– Ultra accurate depth control
\n– Ultra low power operation
\n– Ability to etch in ALE or normal etch mode[\/vc_column_text][\/vc_column][vc_column bg_type=”” dima_canvas_style=”” min_height=”” translate_x=”0″ dima_z_index=”0″ delay=”” delay_duration=”” delay_offset=”” width=”1\/2″][vc_empty_space height=”64px”]

\"\"<\/a><\/div>[\/vc_column][\/vc_row]<\/p>\n","protected":false},"excerpt":{"rendered":"

[vc_row no_margin=”true” section_content=”inside_container” no_padding=”true” bg_type=”” dima_canvas_style=”” translate_x=”0″ dima_z_index=”0″ animate_item=”” delay_duration=”” delay_offset=”” id=”” class=”” border_color=””][vc_column bg_type=”” dima_canvas_style=”” min_height=”” translate_x=”0″ dima_z_index=”0″ delay=”” delay_duration=”” delay_offset=”” width=”1\/2″][vc_column_text]Oxford Instruments Plasma Technology have updated their\u00a0Brochures for ALD and ALE (Atomic Layer Deposition and Atomic Layer Etching in English).[\/vc_column_text][\/vc_column][vc_column bg_type=”” dima_canvas_style=”” min_height=”” translate_x=”0″ dima_z_index=”0″ delay=”” delay_duration=”” delay_offset=”” width=”1\/2″][\/vc_column][\/vc_row][vc_row no_margin=”true” no_padding=”true” bg_type=”” dima_canvas_style=”” […]<\/p>\n","protected":false},"author":1,"featured_media":8704,"comment_status":"closed","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[119],"tags":[],"class_list":["post-8715","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-oxford-instruments-plasma-technology-2-en"],"_links":{"self":[{"href":"https:\/\/avactec.es\/en\/wp-json\/wp\/v2\/posts\/8715","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/avactec.es\/en\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/avactec.es\/en\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/avactec.es\/en\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/avactec.es\/en\/wp-json\/wp\/v2\/comments?post=8715"}],"version-history":[{"count":0,"href":"https:\/\/avactec.es\/en\/wp-json\/wp\/v2\/posts\/8715\/revisions"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/avactec.es\/en\/wp-json\/wp\/v2\/media\/8704"}],"wp:attachment":[{"href":"https:\/\/avactec.es\/en\/wp-json\/wp\/v2\/media?parent=8715"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/avactec.es\/en\/wp-json\/wp\/v2\/categories?post=8715"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/avactec.es\/en\/wp-json\/wp\/v2\/tags?post=8715"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}