Vacuum pumps

We are the exclusive agents in Spain for the Shimadzu range of magnetically-levitated turbo molecular pumps.
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hese pumps were originally designed for the demands of semiconductor manufacturers, but the price for this technology has significantly reduced over the last few years and is now accessible for users who need reliable pumps that won’t contaminate their vacuum systems.

Create the vacuum environment that is indispensable for the manufacturing processes of solar cells and semiconductors.

Boasting the highest level of exhaust capacity in the world, Shimadzu’s product lineup is designed to meet the layer deposition and fabrication requirements of solar cell modules and silicon wafers, both of which are becoming increasingly large.

Combination Bearings

A long-life bearing mechanism reduces maintenance costs / The pump can be used in combination with a small backing pump / The pump can be mounted in any orientation.

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Integrated Power Supply Unit

Compact / Energy-saving / No need to install cables or use a control rack / Improved pumping performance / No separate power supply is necessary because AC power supply is directly input.

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Wide-Range Series

Wide-range and high pumping throughput / Digital power supply supported / Various monitoring functions / Network connection enabled / Compliant with CE marking, SEMI S2, and NRTL.

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High Throughput Type

Maximum pumping flowrate / Excellent corrosion resistance / Compact power supply unit / Measures against reaction products (optional) / Various monitoring functions…

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High Compression Ratio

Hydrogen compression ratio of 106 / Battery-less turbomolecular pump with magnetic levitation / Compact pump body and power supply unit / Tuning-free / RS-232C-compliant serial interface is equipped as standard.

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NEST IWATA in the North America subsidiary of ANEST IWATA Corporation in Japan, which is a leading manufacturer specializing in painting equipment, turnkey coating systems, air compressors and high-end dry vacuum pumps.

ANEST IWATA was the first in the world to develop the air-cooled, oil-free, scroll-type vacuum pumps. Our oil-free scroll vacuum pumps are compact and less noise/vibration emitting than other dry vacuum pumps. They are highly valued by customers who need clean, high quality vacuum, especially in analytical and semiconductor related fields.

ISP DRY SCROLL

ISP series of vacuum pumps offer a clean vacuum environment and eliminate the nuisance of cumbersome lubricant maintenance or sealing water administration. ISP is free from installation restrictions because of its air-cooled system. ISP maintains low power consumption from atmosphere to maximum pressure. Maximum pressure is 1[Pa] High reliability.

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DVSL DRY SCROLL

The DVSL scroll pumps are equipped with a dry vacuum system so there is no need for lubricating oil or sealing water. The absence of gears means that it is low-maintenance and there is no need to change gear oil and no risk of lubricating oil leaks. Generator powered vacuum keeps the installation area clean. It is equipped with a water cooling system which eliminates the need to control water cooling on site. DVSL pumps are excellent in displacing water vapor. Low power variance between atmospheric pressure and maximum pressure allows repeated, continuous operation between atmospheric pressure and vacuum. These pumps use up less energy and can lead to savings in the vacuum area. 24-Hour operation secured.

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GVSU DRY SCROLL

The GVSU-500B scroll pump is equipped with a dry vacuum system so there is no need for lubricating oil or sealing water. The absence of gears means that it is low-maintenance and there is no need to change gear oil and no risk of lubricating oil leaks. Generator powered vacuum keeps the installation area clean. It is equipped with a water cooling system which eliminates the need to control water cooling on site. The GVSU-500B pump is excellent in displacing water vapor. Low power variance between atmospheric pressure and maximum pressure allows repeated, continuous operation between atmospheric pressure and vacuum. This pump uses up less energy and can lead to savings in the vacuum area. 24-Hour operation secured.

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