Power supplies

Avactec is the exclusive distributor in Spain and Portugal of the "Power Delivery" products of Advanced Energy.
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dvanced Energy is a global leader in innovative power and control technologies for high-growth, precision power conversion solutions.
Systems from Advanced Energy help thin-film manufacturing companies and R&D institutes, from all over the world, propel their growth and innovation.

Their power products offer:

  • Unrivaled power plasma control.
  • Unmatched DC and RF arc handling.
  • Cutting-edge impedence-matching technology.
  • Leading energy delivery solutions, integrated and tested in the field.

Their products are used for:

  • RF cleaning
  • Metal and dielectric etching
  • Photoresist ashing
  • Chemical vapor deposition: (CVD) / Plasma-enhanced chemical (PECVD)
  • Physical vapor deposition (PVD)
  • Sputter deposition

DC POWER SOURCES

Straight DC sputtering, using a DC power supply to power a magnetron, is the simplest and cheapest of the sputtering techniques. Compared to the other methods, it gives the highest sputtering rate and reasonable film quality. However, it can only be used with conducting targets.

Typical applications for DC sputtering include:

Semiconductor (copper, aluminium, tantalum, titanium, and newer exotic materials)
Flat panel display (thin-film transistor, color filter, organic LEDs)
Data storage (optical storage, magnetic storage, and combinations of magneto-optical storage)

Solar photovoltaic cell (transparent conductive oxides and Si deposition)
Architectural glass
Advanced product applications (thin films for optics, tool coating, plastics, etc.)

Serie Pinnacle®

Air-cooled power conversion and control systems
Range: 6 to 200 kW

CHARACTERISTICS

Pinnacle® Plus

Pinnacle with internal pulsing


Range:
Adjustable from 5 to 350 kHz

CHARACTERISTICS

Pinnacle® 3000

Air-cooled power conversion and control systems
Range: 3 kW

CHARACTERISTICS

Pinnacle® Diamond™

Water-cooled power conversion and control systems
Range: 8 to 15 kW

CHARACTERISTICS

ASCENT® AMS

Water-cooled power conversion and control systems
Range: 30 to 60 kW

CHARACTERISTICS

MDX 1 kW & 1.5 kW

Air-cooled power conversion and control systems
Range: 1,0 to 1,5 kW

CHARACTERISTICS

MDX 500 kW

Air-cooled power conversion and control systems
Range: 0,5 kW

CHARACTERISTICS

SOLVIX® DC

Power conversion and control systems


Range:
3 to 40 kW

CHARACTERISTICS

AC POWER SYSTEMS

Low- and mid-frequency power supplies from Advanced Energy offer highly efficient, easy-to-integrate power for improved process control in a wide variety of vacuum deposition applications.

Mid-Frequency PDX ®

Low power (1250 and 1400 W) and high power (5000 and 8000 W) power supplies.

CHARACTERISTICS

Low-Frequency PEII

Modulation power supplies by pulse width of 40 kHz (PWM) with outputs up to 60 kW.

CHARACTERISTICS

Crystal®

Fast but stable power. With power granularity from 60 to 180 kW.

CHARACTERISTICS

LFGS RF Generators

Power supplies: Variable frequency generator (1250 W, 40 to 500 kHz).

CHARACTERISTICS

ASCENT® DMS

New!The Ascent DMS MF-120 package now offers a cost-effective average frequency power for standard cathodes, while offering benefits of bipolar pulse technology..

CARACTERÍSTICAS

RF POWER SYSTEMS AND MATCHING UNITS

Sputtering using an RF power supply has the advantage that it can be used for insulating as well as conducting targets. It also gives much higher film quality when compared to straight DC sputtering. However, the sputtering rate is low (around 20% that of straight DC) and the equipment cost is higher as a matching unit is needed as well as an RF power supply.

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