ith more than 35 years of experience, CS CLEAN SOLUTIONS GmbH is your reliable partner for exhaust gas abatement in semiconductor, photovoltaic and related industries.
Our customers include all major chip manufacturers and the world’s leading research institutes.
Our environmentally friendly CLEANSORB®technology is developed in Ismaning near Munich and marketed through an international sales and service network.
As the global technology leader in our field, our dry exhaust gas abatement does not require the use of fossil fuels or water providing additional benefits to the environment and the climate.
Purification of waste gas is based on our proprietary dry bed absorption technology. All products have earned an unparalleled track record for safety, process reliability and environmentally-sustainable manufacturing.
Whether your abatement application is in the semiconductor, photovoltaic, pharmaceutical, or chemical industries, it requires the removal of downstream hazardous gases. Discover the benefits of CS CLEAN SOLUTIONS’ unique technology and worldwide support to keep your manufacturing process safe.
CLEANSORB® STAND ALONE
For small-scale research work, stand-alone absorber columns can be used to remove remaining gas concentrations downstream of the experimental chamber. Several safety components are available as accessories, including an air-extractable housing cabinet as well as options for pressure monitoring and downstream gas detection.
CLEANSORB® LABLINE
A small absorber column housed in a compact, air-extracted cabinet. Is permanently on ready and does not have to be heated up or otherwise activated each time a new experiment is to be run.
CLEANSORB® FABLINE
Is the standard CLEANSORB model for waste gas removal on factory-scale applications. Available in three column sizes, the system is readily adaptable to the requirements of both pilot line and full-scale manufacturing.
CLEANSORB® PRIMELINE
Represents the fully-featured version of the CLEANSORB family of dry bed exhaust gas abatement systems. The system is especially engineered to handle the gas flows and related operating conditions of safety-critical process applications – notably those of Metal Organic Chemical Vapor Deposition.
Plasma Conversion PCS TROPO & PCS STRATO
The PCS TROPO and PCS STRATO atmospheric plasma conversion systems are high performance plasma sources, developed to destroy perfluorinated compounds such as CF4, CHF3, SF6 and NF3 that are emitted from semiconductor etch and related processes.
Plasma Conversion PCS TROPO & PCS STRATO
Is a high performance plasma source, developed to destroy NH3 which is emitted from GaN and related processes. For existing installations requiring NH3 removal capability, the PCS EXO is readily retrofitted. Chlorine used during cleaning steps is best removed using a CLEANSORB® dry bed chemisorber.
Available for a wide range of special purpose gases
At the heart of the CLEAN-PROTECT system is the dry chemisorbent material, CLEANSORB®. Escaping gases undergo an irreversible chemical reaction (oxidation or neutralization) within the CLEAN-PROTECT system, where they are safely converted into solid by-products. The system is installed inline with downstream air extract ducting and does not require power or other facilities to operate, meaning that it is permanently on stand-by.
The CLEAN-PROTECT system is manufactured from high-quality 316L stainless steel. In the absence of a gas release incident the change-out frequency of the absorber bed is five years.
CLEANVENT – Mini cartridge for gas cabinet vent lines
For over 20 years the CLEANVENT cartridge has proven itself a safe solution for the removal of hazardous purge gases.
Installed within the gas cabinet on the suction side of the venturi vacuum generator, or in a valve manifold box, the CLEANVENT cartridge allows residual gases to be scrubbed “at-source“.
Designed to absorb toxic or dangerous gases in case of emergency due to gas leakage
Before a new gas cylinder is put on-line within a gas supply cabinet, process gas remaining from the previous cylinder must first be removed – both for reasons of safety and to ensure integrity of the fresh gas supply. The dead volume of residual gas is likely to be highly concentrated, toxic, pyrophoric, or corrosive, thus posing a considerable safety hazard.
Purge gases are evacuated through the absorber bed of the cartridge and are purified from hazardous gas concentrations by irreversible chemical conversion to solids. Refillable CLEANVENT cartridge types are available for a broad range of specialty gases and are supported by CS CLEAN SYSTEMS worldwide network of service partners.
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