ngstrom Sciences, Inc. was founded in 1988 to supply advanced magnetrons and refined materials for plasma vapor deposition of high quality thin films. With a strong focus on research and development, the company soon patented several technical advancements in magnetics, water-cooling, and circular magnetron target clamping designs. The features of the Angstrom Advantage™ have created the most advanced and easy-to-use magnetrons in the thin film industry.
Angstrom Sciences’ circular magnetrons have become recognized as the new standard of the sputtering industry, because in addition to the advanced features of the Angstrom Advantage™, they offer a host of other performance advantages as well.
Their compact design makes our circular magnetrons ideal for any new or retrofit application, including the most complex cluster assemblies for the smallest vacuum chambers.
Low-impedence heads provide RF, DC, mid-frequency DC, pulsed DC, and microwave power compatibility.Circular Magnetron External.
They use ISO NW standard fittings, as well as Conflat® metal seal flanges. All utilities are maintained at atmosphere and accessed through standard O-ring compression fittings for easy installation in any vacuum system.
Circular magnetron sources are available from 1″ (25mm) through 16″ (406mm) target diameters in either standard or custom configurations.Circular Magnetron Precision Flex.
The patented threaded target clamp and anode shield allow you to change targets without the use of ancillary tools. Their built-in adjustability also lets you fit targets of varying thickness without resorting to spacing devices.
ONYX® magnetrons can operate at extremely low pressure (down to the 10-4 Torr range), and our direct cooled designs can deliver power densities up to 250 watts/in2 (30 watts/cm2).
Circular Magnetron Right Angle Shutter.With higher power densities, you can coat a substrate faster. So Angstrom Sciences maximizes both your coating zone and your target utilization (usually in the 40% range) without a trade-off in rate.
Thanks to their patented profiled magnets, our magnetrons also deliver much greater uniformity of deposition – routinely in the ± 3-5% range.
All Angstrom Sciences’ magnetrons are guaranteed against defects in workmanship and materials for two full years.
Deposition sources for research of Focus GMBH, electron beam evaporators and sources for the production of Sputtering Components Inc.
hermionics Laboratory, Inc.Founded in 1958 Thermionics is celebrating its 62nd year as the innovator in the research, design and manufacturing of precision vacuum equipment for scientific and industrial applications. From their standard product lines to custom equipment, they exceed customer’s requirements by setting the standard in quality and durability.
For new components and systems, to the modification and repair of existing equipment, to cleaning and refurbishing used equipment, Thermionics delivers the best equipment, services and value to customers around the world.
