Oxford Instruments Plasma Technology have updated their brochures for ALD and ALE


Oxford Instruments Plasma Technology have updated their Brochures for ALD and ALE (Atomic Layer Deposition and Atomic Layer Etching in English). Brochures for ALD and ALE ALD Technique (Atomic Layer Deposition) ALD is a technique for the deposition of precisely controlled ultra-thin films for advanced applications on the nanometre scale, with conformal coating into high aspect ratio structures. Highlights -...